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UHNF
Microfabrication
Lithography
Electron Beam Lithography
Nanoimprint Lithography
Photolithography
KLayout
Graph Digitizer
Deposition
Electron Beam Evaporation
Sputtering
Sputter Coating
Spin Coating
Etching
Ion Milling
Reactive Ion Etching
Wet Etching
Others
Annealing
Rapid Thermal Processing
UV Ozone Cleaning
Processes
Pythography
Microscopy
Atomic Force Microscopy
Scanning Electron Microscopy
Focused Ion Beam
Profilometry
Services
Fabrication
Project Assessment
Technology Development
Controls and Automation
Core Technology
Software
Lab Management
Standard Operating Procedure
Standard Servicing Procedure
Printed Circuit Board
Gallery
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Rates
Scheduler
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Maps and Parking
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Microfabrication
Lithography
Electron Beam Lithography
Nanoimprint Lithography
Photolithography
KLayout
Graph Digitizer
Deposition
Electron Beam Evaporation
Sputtering
Sputter Coating
Spin Coating
Etching
Ion Milling
Reactive Ion Etching
Wet Etching
Others
Annealing
Rapid Thermal Processing
UV Ozone Cleaning
Processes
Pythography
Microscopy
Atomic Force Microscopy
Scanning Electron Microscopy
Focused Ion Beam
Profilometry
Services
Fabrication
Project Assessment
Technology Development
Controls and Automation
Core Technology
Software
Lab Management
Standard Operating Procedure
Standard Servicing Procedure
Printed Circuit Board
Gallery
Become a Member
Rates
Scheduler
Training Request
Menu
About Us
Cleanroom Facility
Contact Us
Maps and Parking
Toggle website search
Rates Effective 9/1/2020
Tool
Type
UH
2
[$/Hr]
Other Academic [$/Hr]
Non Academic [$/Hr]
ABM Mask Aligner
Photolithography
45
67.5
100
AR MFP-3D-Origin+z
Atomic Force Microscopy
20
30
100
Denton Desk II
Sputtering Coating
20
30
60
Custom Evaporator
eBeam Evaporator
10
15
75
FEI DB235
Electron Microscopy
50
75
150
FEI DB235
Focused Ion Beam
50
75
150
Custom Ion Mill
Ion Mill
10
15
75
Elionix ELS-G100
5
eBeam Lithography
60
133.1
425
OI Plasmalab 80
Reactive Ion Etcher
60
90
100
OI Plasmalab 100
Reactive Ion Etcher
60
90
100
OI Plasmalab 100 ICP
Deep Reactive Ion Etcher
60
90
150
Allwin AW 410 RTP
Rapid Thermal Processor
10
15
50
Brewer Cee 100X
Spin Coater
0
0
0
AJA ATC-2200
Sputtering
30
45
150
Nanonex NX-2004
Nanoimprinter
10
15
50
Cleanroom Access
3
35
52.5
100
Training
200
200
200
Staff Service
4
150
150
150
Self-use is charged at the base rate
Gulf Coast Consortia (GCC) Member Institutions
are charged at the UH Rate
Cleanroom Access is a daily rate
Staff Service rate is charged in addition to any equipment rate
This equipment is owned an operated at Rice University
Shared Equipment Authority
. Rice University is a member of GCC.