Rates Effective 9/1/2020
| Tool | Type | UH2 [$/Hr] | Other Academic [$/Hr] | Non Academic [$/Hr] |
|---|---|---|---|---|
| ABM Mask Aligner | Photolithography | 45 | 67.5 | 100 |
| AR MFP-3D-Origin+z | Atomic Force Microscopy | 20 | 30 | 100 |
| Denton Desk II | Sputtering Coating | 20 | 30 | 75 |
| Custom Evaporator | eBeam Evaporator | 10 | 15 | 75 |
| FEI DB235 | Electron Microscopy | 25 | 37.5 | 150 |
| Custom Ion Mill | Ion Mill | 10 | 15 | 75 |
| Elionix ELS-G1005 | eBeam Lithography | 60 | 133.1 | 425 |
| OI Plasmalab 100 ICP | Deep Reactive Ion Etcher | 60 | 90 | 150 |
| Allwin AW 410 RTP | Rapid Thermal Processor | 10 | 15 | 75 |
| Brewer Cee 100X | Spin Coater | 0 | 0 | 0 |
| AJA ATC-2200 | Sputtering | 30 | 45 | 150 |
| Filmetrics Profilm3D | 3D Optical Profilometer | 10 | 15 | 75 |
| Nanonex NX-2004 | Nanoimprinter | 10 | 15 | 75 |
| Cleanroom Access3 | 35 | 52.5 | 100 | |
| Training | 200 | 200 | 200 |
- Self-use is charged at the base rate
- Gulf Coast Consortia (GCC) Member Institutions are charged at the UH Rate
- Cleanroom Access is a daily rate
- Staff Service rate is charged in addition to any equipment rate
- This equipment is owned an operated at Rice University Shared Equipment Authority. Rice University is a member of GCC.