Rates Effective 9/1/2020

Tool	Type	UH2 [$/Hr]	Other Academic [$/Hr]	Non Academic [$/Hr]
ABM Mask Aligner	Photolithography	45	67.5	100
AR MFP-3D-Origin+z	Atomic Force Microscopy	20	30	100
Denton Desk II	Sputtering Coating	20	30	60
Custom Evaporator	eBeam Evaporator	10	15	75
FEI XL-30	Electron Microscopy	25	37.5	100
FEI DB235	Focused Ion Beam	50	75	150
Custom Ion Mill	Ion Mill	10	15	75
Jeol JBX-5500FS	eBeam Lithography	60	90	200
OI Plasmalab 80	Reactive Ion Etcher	60	90	100
OI Plasmalab 100	Reactive Ion Etcher	60	90	100
OI Plasmalab 100 ICP	Deep Reactive Ion Etcher	60	90	150
Allwin AW 410 RTP	Rapid Thermal Processor	10	15	50
Brewer Cee 100X	Spin Coater	0	0	0
AJA ATC-2200	Sputtering	30	45	150
Nanonex NX-2004	Nanoimprinter	10	15	50
Cleanroom Access3		35	52.5	100
Training		200	200	200
Staff Service4		150	150	150

1. Self-use is charged at the base rate
2. Gulf Coast Consortia (GCC) Member Institutions are charged at the UH Rate
3. Cleanroom Access is a daily rate
4. Staff Service rate is charged in addition to any equipment rate