Electron Beam Evaporation
Electron beam evaporation is a technique for depositing a variety of materials onto a substrate. This is achieved by focusing a beam of electrons into a tiny spot and directing it towards a material in the crucible inside a vacuum chamber. The electron beam heats up the material until it evaporates, coating everything inside the vacuum chamber. This technique can deposit materials at a rate of up to 1 [nm/s].
Thermionics eBeam Evaporator
|3" Wafer or
4" Wafer or
|0 to 2 [nm/s]
|Au, Co, Cr, Cu, W
|< 3500 [°C]
|SOP: Custom Thermionics Ebeam Evaporator
|This document is the standard operating procedure (SOP) for the custom Thermionics electron beam evaporation system at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.
|SSP: Custom Thermionics Ebeam Evaporator
|This is a service manual we developed for the custom Thermionics electron beam evaporation system at UHNF. This document ensures that any staff can effectively perform routine service or repairs effectively, quickly and at significantly lower cost. This document is restricted to equipment custodians. Contact us for access.