Spin coating is a technique for depositing material from a liquid source. A solid material is dissolved into a liquid solvent and dispensed onto a substrate. The substrate is spun at a high speed to spread the material into a thin uniform film. The material solidifies as the solvent evaporates.
Brewer Cee 200X
|Sample Size||100 [mm] Wafer or
75 [mm] Wafer or
|Spinning Speed||0 to 6000 [rpm]|
|SOP: Brewer Cee 200X||This document is the standard operating procedure (SOP) for the Brewer Cee 200X spin coater at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.|
|SSP: Brewer Cee 200X||This is a service manual we developed for the Brewer Cee 200X spin coater at UHNF. This document ensures that any staff can effectively perform routine service or repairs effectively, quickly and at significantly lower cost. This document is restricted to equipment custodians. Contact us for access.|