Focused Ion Beam

Focused ion beam (FIB) is a multitool that can inspect, cut, deposit and touch a sample with nanoscale precision. A standard FIB is equipped with a scanning electron microscope to provide real time imaging with up to 800,000X magnification, a focused ion beam to mill custom patterns, a probe to manipulate the sample, and a gas injection system to deposit platinum.

Equipment Name

DescriptionSpecification
SEM Resolution< 5 [nm]
SEM Magnification100X to 800,000X
FIB Resolution< 20 [nm]
FIB Current10 [pA] to 20 [nA]
Probe XYZ Resolution< 200 [nm]
Gas Injection SystemPlatinum
EDAX Chemical AnalysisYes
XY Stage Range75 mm
XY Stage Tilt-5° to 55°
Sample Max Dimensions100 mm x 100 mm wide
10 mm tall
Equipment_FIB_A
Equipment_FIB_B
Equipment_FIB_C

Examples

FIB_Carousel_TEM_Protect
Platinum is deposited to protect the sample from ion beam damage.
FIB_Carousel_TEM_Cut
The focused ion beam is used to prepare a section of the sample for lift out.
FIB_Carousel_TEM_LiftOut
A probe is attached to the sample section using platinum. The sample section is then detached from the sample and lifted out.
FIB_Carousel_TEM_Attach
The sample section is attached to a post on a TEM half grid using platinum.
FIB_Carousel_TEM_Polish
The sample section is finally polished until it is less than 100 [nm] thick so that it can be imaged in a transmission electron microscope.
SEM_Carousel_ThinSilicon
The resolution of a scanning electron microscopy is approximately 5 [nm]. This sample was thinned using a focused ion beam in order to image it in a transmission electron microscope which can resolve atoms.
Deposition_PtTip_1
A platinum nano-needle is deposited at the tip of an atomic force microscope probe. The nano-needle is approximately 2 [μm] tall and 50 [nm] wide.
Deposition_PtTip_2
A platinum nano-needle is deposited at the tip of an atomic force microscope probe. The nano-needle is approximately 2 [μm] tall and 50 [nm] wide.
Deposition_ParticleProbe
Platinum is used to fix a 500 [nm] iron oxide nanoparticle to the tip of an atomic force microscope probe.
FIB Particle Manipulation
A tungsten probe can be used to pick up a 200 nm particle and place it near the center of a 400 nm square pad!

Core Technology

Core TechnologyDescription
SOP: FEI DB235This document is the standard operating procedure (SOP) for the FEI DB235 focused ion beam system at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.
SSP: FEI DB235This is a service manual we developed for the FEI DB235 focused ion beam system at UHNF. This document ensures that any staff can effectively perform routine service or repairs effectively, quickly and at significantly lower cost. This document is restricted to equipment custodians. Contact us for access.

Guide

GuideDescription
PrimerLearn the basics of electron microscopy from Bob Hafner at University of Minnesota.
Biological Sample PreparationLearn various procedures for preparing biological samples for scanning electron microscopy.