Focused Ion Beam

Focused ion beam (FIB) is a multitool that can inspect, cut, deposit and touch a sample with nanoscale precision. A standard FIB is equipped with a scanning electron microscope to provide real time imaging with up to 800,000X magnification, a focused ion beam to mill custom patterns, a probe to manipulate the sample, and a gas injection system to deposit platinum.

Equipment Name

SEM Resolution< 5 [nm]
SEM Magnification100X to 800,000X
FIB Resolution< 20 [nm]
FIB Current10 [pA] to 20 [nA]
Probe XYZ Resolution< 200 [nm]
Gas Injection SystemPlatinum
EDAX Chemical AnalysisYes
XY Stage Range75 mm
XY Stage Tilt-5° to 55°
Sample Max Dimensions100 mm x 100 mm wide
10 mm tall


Core Technology

Core TechnologyDescription
SOP: FEI DB235This document is the standard operating procedure (SOP) for the FEI DB235 focused ion beam system at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.
SSP: FEI DB235This is a service manual we developed for the FEI DB235 focused ion beam system at UHNF. This document ensures that any staff can effectively perform routine service or repairs effectively, quickly and at significantly lower cost. This document is restricted to equipment custodians. Contact us for access.


PrimerLearn the basics of electron microscopy from Bob Hafner at University of Minnesota.
Biological Sample PreparationLearn various procedures for preparing biological samples for scanning electron microscopy.