Optical 3D Profilometry is a technique to measure the topography of a sample using a microscope. This is achieved by using a special lens to take photos as we scan the focus from beneath to above the sample. The computer will process the image stack to produce a topography map of the sample. This technique is very fast and very accurate.
Filmetrics Profilm3D
Description
50x Objective
10x Objective
Compatible Samples
75 [mm] wafer or
100 [mm] wafer or
custom chip
75 [mm] wafer or
100 [mm] wafer or
custom chip
Stage Range
100 [mm] x 100 [mm]
100 [mm] x 100 [mm]
Vertical Range
10 [mm]
10 [mm]
Vertical Resolution
0.1 [nm]
1.0 [nm]
Height Accuracy
0.7%
0.7%
Lateral Resolution
0.5 [um]
1 [um]
Field of View
0.4 [mm] x 0.34 [mm]
2.0 [mm] x 1.7 [mm]
Image Stitching
Yes
Yes
Examples
Height measurements are accurate to within 1%
A single measurement takes less than 1 minute
Multiple measurements can be stitched together to visualize large samples
This document is the standard operating procedure (SOP) for the ABM Mask Aligner at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.