Profilometry is a technique for measuring surface roughness. This is achieved by scanning a stylus with a sharp tip across a sample and recording the height of the stylus.
Equipment Name
Description
Specification
Compatible Samples
75 [mm] wafer or
100 [mm] wafer or
custom chip
Vertical Resolution
0.5 [nm] or 5 [nm]
Vertical Range
± 16 [μm] or ± 160 [μm]
Scan Resolution
down to 40 [nm]
Scan Range
up to 10 [mm]
Stylus Radius
5 [μm]
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Examples
The tip of a stylus is used to scan the roughness of a surface
The radius of curvature of the stylus is approximately 2.5 μm
This document is the standard operating procedure (SOP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.
This document is the standard service procedure (SSP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SSP ensures that any staff can effectively perform routine service or repairs correctly, the first time. This document is restricted to equipment custodians. Contact us for access.