Profilometry
Profilometry is a technique for measuring surface roughness. This is achieved by scanning a stylus with a sharp tip across a sample and recording the height of the stylus.
Equipment Name
| Description | Specification |
|---|---|
| Compatible Samples | 75 [mm] wafer or 100 [mm] wafer or custom chip |
| Vertical Resolution | 0.5 [nm] or 5 [nm] |
| Vertical Range | ± 16 [μm] or ± 160 [μm] |
| Scan Resolution | down to 40 [nm] |
| Scan Range | up to 10 [mm] |
| Stylus Radius | 5 [μm] |
Previous
Next
Examples
Previous
Next
Core Technology
| Core Technology | Description |
|---|---|
| SOP: Alpha-Step 200 | This document is the standard operating procedure (SOP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time. |
| SSP: Alpha-Step 200 | This document is the standard service procedure (SSP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SSP ensures that any staff can effectively perform routine service or repairs correctly, the first time. This document is restricted to equipment custodians. Contact us for access. |
Guide
| Guide | Description |
|---|---|
| Characterizing Roughness | Learn how to evaluate surface roughness with a profilometer |