Profilometry

Profilometry is a technique for measuring surface roughness. This is achieved by scanning a stylus with a sharp tip across a sample and recording the height of the stylus.

Equipment Name

DescriptionSpecification
Compatible Samples75 [mm] wafer or
100 [mm] wafer or
custom chip
Vertical Resolution0.5 [nm] or 5 [nm]
Vertical Range± 16 [μm] or ± 160 [μm]
Scan Resolutiondown to 40 [nm]
Scan Rangeup to 10 [mm]
Stylus Radius5 [μm]
Equipment_Profilometer_A
Equipment_Profilometer_B
Equipment_Profilometer_C

Examples

Profilometer_Example_A
The tip of a stylus is used to scan the roughness of a surface
Profilometer_Example_B
The radius of curvature of the stylus is approximately 2.5 μm

Core Technology

Core TechnologyDescription
SOP: Alpha-Step 200This document is the standard operating procedure (SOP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SOP serves as a foundation for initial training and ensures that the equipment can be operated correctly, by everyone, the first time.
SSP: Alpha-Step 200This document is the standard service procedure (SSP) for the Tencor Alpha-Step 200 profilometer at UHNF. This SSP ensures that any staff can effectively perform routine service or repairs correctly, the first time. This document is restricted to equipment custodians. Contact us for access.

Guide

GuideDescription
Characterizing RoughnessLearn how to evaluate surface roughness with a profilometer